| 摘要 |
<P>PROBLEM TO BE SOLVED: To polish a transparent substrate with highly accurate planar parallelism by eliminating an adhesive for joining between plural sheets of the transparent substrates to be machined or between the transparent substrate and a dummy substrate. <P>SOLUTION: The method for manufacturing a workpiece composed of laminated substrates includes a step for forming a plurality of recessed parts 12 on one main face of a first transparent substrate 11, a step for joining the first transparent substrate 11 with a second transparent substrate 13 by a direct joining method, a step for polishing each transparent substrate while measuring the thickness by emitting a laser to each recessed part 12 from the outside of each transparent substrate, a step for directly joining a third transparent substrate 14, to which the recessed part 12 is formed, to the first transparent substrate 11 and for polishing the third transparent substrate 13 while measuring the thickness by emitting a laser to the recessed part 12, and a step for manufacturing the workpiece by cutting the laminated substrate 16 manufactured by repeating the above steps. <P>COPYRIGHT: (C)2007,JPO&INPIT |
