发明名称 METHOD OF FORMING BACKSIDE POINT CONTACT STRUCTURES FOR SILICON SOLAR CELLS
摘要 <p>A method for fabricating point contacts to the rear surface of a silicon solar cell by coating the rear surface with a masking layer and a laser absorptive layer and directing laser radiation to the rear surface to form openings therein after which doping material is applied through the openings and contacts are applied. The doping is preferably performed by plasma immersion ion implantation.</p>
申请公布号 EP2220667(A1) 申请公布日期 2010.08.25
申请号 EP20080850766 申请日期 2008.11.14
申请人 APPLIED MATERIALS, INC. 发明人 BORDEN, PETER
分类号 H01L21/00 主分类号 H01L21/00
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