发明名称 Structures, fabrication methods, and design structures for multiple bit flash memory cells
摘要 A semiconductor structure, a fabrication method, and a design structure of the same. The semiconductor structure includes (i) a semiconductor substrate which includes a top substrate surface perpendicular to the top substrate surface, (ii) a control gate electrode region and a first semiconductor body region on the semiconductor substrate, and (iii) a second semiconductor body region on the first semiconductor body region. The semiconductor structure further includes (i) a first gate dielectric region sandwiched between the first semiconductor body region and the control gate electrode region and (ii) a second gate dielectric region sandwiched between the second semiconductor body region and the control gate electrode region. The second semiconductor body region overlaps the first semiconductor body region in the reference direction. A first thickness of the first gate dielectric region is different from a second thickness of the second gate dielectric region.
申请公布号 US7781817(B2) 申请公布日期 2010.08.24
申请号 US20080146500 申请日期 2008.06.26
申请人 INTERNATIONAL BUSINESS MACHINES CORPORATION 发明人 ZHU HUILONG;LUO ZHIJIONG
分类号 H01L27/108 主分类号 H01L27/108
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