| 摘要 |
Provided is a test apparatus that tests a device under test, comprising a control apparatus that controls the test apparatus; a pattern generator that generates a plurality of test patterns to be provided to a plurality of input terminals of the device under test; a plurality of variable delay circuits that designate a timing for supplying each of the plurality of test patterns to a corresponding input terminal of the plurality of input terminals; and a plurality of micro-controllers that operate in parallel, according to instructions from the control apparatus, to each measure a delay amount of a variable delay circuit when the variable delay circuit is set with a prescribed delay setting value and store the delay setting value in association with the measured delay amount.
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