发明名称 |
MIM capacitor and metal interconnection |
摘要 |
Disclosed are an MIM (Metal-Insulator-Metal) capacitor and a method of manufacturing the same. The MIM capacitor includes: a lower metal layer and a lower metal interconnection on a substrate; a barrier metal layer on the lower metal layer; an insulating layer on the barrier metal layer; an upper metal layer on the insulating layer; an interlayer dielectric layer having a via hole on the lower metal interconnection; and a plug in the via hole.
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申请公布号 |
US7781865(B2) |
申请公布日期 |
2010.08.24 |
申请号 |
US20090476923 |
申请日期 |
2009.06.02 |
申请人 |
DONGBU ELECTRONICS CO., LTD. |
发明人 |
KIM BONG JUN |
分类号 |
H01L29/00 |
主分类号 |
H01L29/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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