Defect detecting apparatus, defect detecting method, information processing apparatus, information processing method, and program therefor

摘要

A defect detecting apparatus captures an image of a protein chip formed on each die of a wafer with a low magnification for every first division region obtained by dividing each die in plurality; stores each obtained image as an inspection target image together with an ID for identifying each first division region; creates a model image for every first division region by calculating an average luminance value of pixels of each inspection target image; extracts a difference between the model image and each inspection target image as a difference image; determines presence of a defect by extracting a Blob having an area larger than a preset value from the difference image; captures a high-magnification image of every second division region; creates a model image again and extracts a Blob; and determines the kind of the defect based on a feature point of the defect.