Laser-based method for growing array of carbon nanotubes

摘要

A method for making an array of carbon nanotubes includes the steps of: (a) providing a substrate having a first surface and a second surface opposite to the first surface; (b) forming a catalyst film on the first surface of the substrate; (c) flowing a mixture of a carrier gas and a carbon source gas over the catalyst film; (d) generating a laser beam using a galvanometric scanning system, directing the laser beam toward/on one of the first surface and the second surface to locally heat the catalyst film to a predetermined temperature; and (e) growing an array of the carbon nanotubes from the substrate.