| 摘要 |
One inventive aspect relates a variable capacitor comprising first and second electrically conductive electrodes, arranged above a support structure and spaced apart from each other and defining the capacitance of the capacitor. At least one of the electrodes comprises at least one bendable portion. The bendable portion(s) are actuated by a DC voltage difference which is applied over the electrodes to vary the capacitance. In preferred embodiments, the support structure comprises a layer of higher permittivity than the atmosphere surrounding the electrodes and the electrodes configure as an interdigitated structure upon actuation. Also disclosed is a 2-mask process for producing such capacitors.
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