METHOD OF SEPARATING PLATE MEMBER

摘要

A method of separating plate materials capable of completely separating the plate materials with large areas without using a peeling member and eliminating the possibility of occurrence of permanent deformation on the plate materials. A plurality of suction pads (3) are suckingly disposed on the surface of the uppermost plate material (W1) in a roughly lattice shape. Next, while the uppermost plate material (W1) is held by the suction pads disposed in a staggered shape among the suction pads (3) disposed in the roughly lattice shape, the uppermost plate material (W1) is raised by the remaining suction pads (3). Lastly, the suction pads (3) holding the uppermost plate material (W1) are raised.