发明名称 Method of manufacturing a flash memory device
摘要 A method of manufacturing a flash memory device is disclosed. The method includes the steps of providing a semiconductor substrate in which a cell region and a select transistor region are defined, etching the semiconductor substrate in the select transistor region so that there is a first step between the cell region and the select transistor region, forming a cell gate in the cell region, and forming a transistor in the select transistor region.
申请公布号 US7781275(B2) 申请公布日期 2010.08.24
申请号 US20070758509 申请日期 2007.06.05
申请人 HYNIX SEMICONDUCTOR INC. 发明人 YANG YOUNG HO
分类号 H01L21/00 主分类号 H01L21/00
代理机构 代理人
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