发明名称 Semiconductor device and method of manufacturing the same
摘要 The semiconductor device according to the present invention includes a lower electrode made of a metallic material, a capacitance film made of an insulating material and laminated on the lower electrode, an upper electrode made of a metallic material, opposed to the lower electrode through the capacitance film, and having an outline smaller than that of the lower electrode in plan view along the opposed direction, and a protective film made of the same material as that of the capacitance film and laminated on the upper electrode.
申请公布号 US7781863(B2) 申请公布日期 2010.08.24
申请号 US20080007084 申请日期 2008.01.07
申请人 ROHM CO., LTD. 发明人 YAGI RYOTARO;NAKAO YUICHI;NISHIMURA ISAMU
分类号 H01L29/92;H01L21/02 主分类号 H01L29/92
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