发明名称 High power device isolation and integration
摘要 A structure and method of fabricating the structure. The structure including: a dielectric isolation in a semiconductor substrate, the dielectric isolation extending in a direction perpendicular to a top surface of the substrate into the substrate a first distance, the dielectric isolation surrounding a first region and a second region of the substrate, a top surface of the dielectric isolation coplanar with the top surface of the substrate; a dielectric region in the second region of the substrate; the dielectric region extending in the perpendicular direction into the substrate a second distance, the first distance greater than the second distance; and a first device in the first region and a second device in the second region, the first device different from the second device, the dielectric region isolating a first element of the second device from a second element of the second device.
申请公布号 US7781292(B2) 申请公布日期 2010.08.24
申请号 US20070741889 申请日期 2007.04.30
申请人 INTERNATIONAL BUSINESS MACHINES CORPORATION 发明人 GAMBINO JEFFREY PETER;VOLDMAN STEVEN HOWARD;ZIERAK MICHAEL JOSEPH
分类号 H01L21/336 主分类号 H01L21/336
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