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发明名称
MANUFACTURING METHOD OF A SEMICONDUCTOR ELEMENT
摘要
申请公布号
CA2686094(A1)
申请公布日期
2010.08.24
申请号
CA20092686094
申请日期
2009.11.20
申请人
SUMITOMO ELECTRIC INDUSTRIES, LTD.
发明人
KATAYAMA, KOJI;KITABAYASHI, HIROYUKI;ARAKAWA, SATOSHI
分类号
H01L21/31;H01L21/311
主分类号
H01L21/31
代理机构
代理人
主权项
地址
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