SUBSTRATE TRANSFER ROBOT AND SUBSTRATE TRANSFER APPARATUS HAVING THE SAME, AND SEMICONDUCTOR MANUFACTURING APPARATUS

摘要

PURPOSE: A robot for transferring a substrate, a substrate transfer device including the same, and a semiconductor manufacturing device are provided to select a transfer path with the shortest transfer time by calculating and comparing the transfer time of each transfer path. CONSTITUTION: A substrate griping unit(6) maintains a substrate(W) and is rotatably mounted on the leading end of an arm(4,5). A controller generates an access standby position(11) for a first teaching position and a second teaching position. The controller generates a plurality of paths from the access standby position to the minimum rotation posture of the robot for transferring the substrate and controls the plurality of arms and gripping unit.