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发明名称
Silicon single crystal having high resistivity, producing method and wafer thereof
摘要
申请公布号
KR100977631(B1)
申请公布日期
2010.08.23
申请号
KR20080005371
申请日期
2008.01.17
申请人
发明人
分类号
C30B15/00;C30B29/06
主分类号
C30B15/00
代理机构
代理人
主权项
地址
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