PRODUCTION APPARATUS AND METHOD FOR THIN FILM COMPOUND SEMICONDUCTOR SOLAR CELL USING INDUCTION HEATING METHOD

摘要

PURPOSE: The thin film type compound semiconductor sunlight manufacturing apparatus and the method applying the inductive heating method efficiently improve the temperature of substrate. The phosphor conversion efficiency of the sunlight device is improved. CONSTITUTION: The back contact electrode(11) is evaporated in the insulator substrate(10). The insulator substrate is accepted in the reaction chamber. The substrate(20) for the induction heating is arranged to be separated with the insulator substrate. The AC power source(22) is sanctioned in the substrate for the induction heating and the temperature of the conductive material back contact electrode is rise. The insulator substrate is transferred to the scan type and it is heated.