发明名称 METHOD AND APPARATUS FOR MONITORING GRAIN GROWTH DURING ANNEALING HEAT TREATMENT
摘要 PURPOSE: The crystal growth monitoring method at the annealing process and apparatus thereof monitors the grain size to the real-time. The excessive grain growth is prevented in the thermal process for the residual stress removal. CONSTITUTION: The crystal growth activation energy of specimen is inputted to controller(S10). The cumulative energy value predicting the grain size is calculated and it is monitored in controller(S20). The grain size of specimen and the monitored cumulative energy value is synchronized in controller. The grain size of specimen is on a real time basis monitored(S30).
申请公布号 KR20100092315(A) 申请公布日期 2010.08.20
申请号 KR20090011619 申请日期 2009.02.12
申请人 KOREA INSTITUTE OF INDUSTRIAL TECHNOLOGY 发明人 AN, KYONG JUN;JUN, JOONG HWAN;LEE, HYO SOO;KWON, HYUK CHON
分类号 H01L21/324 主分类号 H01L21/324
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