摘要 |
<P>PROBLEM TO BE SOLVED: To provide an angular velocity detection device capable of reducing an effect onto a detected signal of drive noise which is generated while an angular velocity is not applied. <P>SOLUTION: The detection device includes: a pair of beam-type vibrating arms 11 and 12 extending in the same direction and having the same width and thickness; a beam-type detection arm 20 whose thickness is the same as but width is different from the vibrating arms 11 and 12, and which is arranged amidst the pair of vibrating arms 11 and 12 and extends in the same direction as the vibrating arms 11 and 12; and a detector circuit 600 which detects a deformation in the thickness direction of the detection arm 20, and detects the angular velocity of rotation on the extending direction of the vibrating arms 11 and 12 applied to the vibrating arms 11 and 12 which vibrate in their cross directions. <P>COPYRIGHT: (C)2010,JPO&INPIT |