| 摘要 |
PROBLEM TO BE SOLVED: To provide a probe card maintenance method accurately, rapidly, and easily performing the maintenance of a probe card used for a jig for the electric characteristic inspection of a semiconductor integrated circuit. SOLUTION: The probe card maintenance method includes: heating the probe card and probes provided on the probe card to the same temperature as the test temperature of electric characteristic inspection; and adjusting positions of the plurality of probes while maintaining the temperature of the probe card and the plurality of probes at the test temperature. COPYRIGHT: (C)2010,JPO&INPIT |
