| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an easily-manufacturable planar probe capable of protecting a probe tip, and preventing damage to a recording medium without generating decline of a probe arrangement density, and to provide a method for manufacturing the same. Ž<P>SOLUTION: The probe includes: a projection part 3 projected from one surface of a translucent substrate 2, and sharpened toward the tip; a metal film 4 for covering the surface of the translucent substrate 2 having the projection part 3 formed thereon, on which an opening part 6 for exposing a tip part 3a of the projection part 3 is formed; and a protection film 5 for covering a surface on which the metal film 4 is formed, and having a flattened surface 5a, on which a hole part 7 for facing to the outward, the tip part 3a of the projection part 3 exposed from the opening part 6. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
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