发明名称 MAGNET TARGET AND MAGNETRON SPUTTERING APPARATUS HAVING THE SAME
摘要 A magnet target comprising a fixing plate, a plurality of shafts arranged in an array, a plurality of connecting rods pivotably provided onto a plate surface of the fixing plate at one end and capable of rotating about corresponding one of the shafts, and a plurality of magnets that are each attached to the other fee end of one connecting rod. The magnets comprise magnets having external S poles and magnets having external N poles, and the magnets having external S poles and magnets having external N poles are arranged alternatively in an array.
申请公布号 US2010206726(A1) 申请公布日期 2010.08.19
申请号 US20100703302 申请日期 2010.02.10
申请人 BEIJING BOE OPTOELECTRONICS TECHNOLOGY CO., LTD. 发明人 ZHAO XIN;ZHANG WENYU
分类号 C23C14/35;H01F7/02 主分类号 C23C14/35
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