发明名称 METHOD FOR FABRICATING NANO-SCALE PATTERNED SURFACES
摘要 A method for fabrication of substrate having a nano-scale surface roughness is presented. The method comprises: patterning a surface of a substrate to create an array of spaced-apart regions of a light sensitive material; applying a controllable etching to the patterned surface, said controllable etching being of a predetermined duration selected so as to form a pattern with nano-scale features; and removing the light sensitive material, thereby creating a structure with the nano-scale surface roughness. Silanizing such nano-scale roughness surface with hydrophobic molecules results in the creation of super- hydrophobic properties characterized by both a large contact angle and a large tilting angle. Also, deposition of a photo-active material on the nano-scale roughness surface results in a photocathode with enhanced photoemission yield. This method also provides for fabrication of a photocathode insensitive to polarization of incident light.
申请公布号 WO2009113063(A3) 申请公布日期 2010.08.19
申请号 WO2009IL00269 申请日期 2009.03.10
申请人 YEDA RESEARCH & DEVELOPMENT COMPANY LTD. N;NAAMAN, RON;GOLAN, BEN;FRADKLIN, ZEEV;WINKLEMAN, ADAM;ORON, DAN 发明人 NAAMAN, RON;GOLAN, BEN;FRADKLIN, ZEEV;WINKLEMAN, ADAM;ORON, DAN
分类号 B81C1/00;H01J1/304;H01J1/34 主分类号 B81C1/00
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