MULTIFUNCTIONAL SCANNING PROBE MICROSCOPE

摘要

The invention relates to a multifunctional scanning probe microscope comprising: a base (1); a preliminary approach unit (3) movably mounted on the base (1); a piezoscanner (4) disposed on the preliminary approach unit (3); an object holder (5) disposed on the piezoscanner (4); a sample (6) which comprises a measuring area (M) and is attached to the piezoscanner (4) with the aid of the object holder (5); a platform (9) attached to the base (1) opposite the sample (6); and an analyzer mounted on the platform (9) and comprising a first measuring head (13) which is oriented towards the sample (6) and is adapted for probing the measuring area (M) of the sample (6). The microscope also comprises first and second guides (10, 11) fastened to the platform (9), the analyzer comprises a second measuring head (16) which is oriented towards the sample (6) and is adapted for probing the measuring area (M) of the sample (6), and the first and second measuring heads (13, 16) are movably mounted on the first and second guides (10, 11) respectively.