| 摘要 |
PROBLEM TO BE SOLVED: To provide a shape measuring device for easily adjusting a zero-point of a sequential three-point method in the measurement of a linear shape of a long, large area and a planar shape on a machine tool or a measurement system similar to the machine tool and measuring without changing the position of a surface to be measured of a long object to be measured differently from an inversion method. SOLUTION: The shape measuring device includes an attitude variation mechanism for rotatably supporting a holder 38 so that the holder 38 can take a second attitude position D2 and a third attitude position D3 where detection sensitivity axis directions K of displacement sensors 41-43 are included in a horizontal surface and are in mutually opposite directions, and a first attitude position D1 directed toward a perpendicular direction orthogonal to the horizontal surface. The shape measuring device calculates zero-point adjustment errors of the displacement sensors 41-43 by comparing a width straight shape obtained by performing scanning measurement of a reference width straightedge ruler in scanning directions with the arrangement directions of the displacement sensors 41-43 as the scanning directions, measures the sectional shape of the object to be measured by the sequential three-point method for calibration based on the zero-point adjustment errors. COPYRIGHT: (C)2010,JPO&INPIT
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