发明名称 SOLID-STATE IMAGING DEVICE AND METHOD FOR FABRICATING THE SAME
摘要 A solid-state imaging device comprises an imaging region, a peripheral circuit region formed in an outer peripheral portion of the imaging region, a first conductivity type semiconductor substrate having the imaging region and the peripheral circuit region on a main surface thereof, a second conductivity type first semiconductor layer formed in the semiconductor substrate, a first conductivity type second semiconductor layer formed in first semiconductor layer, a through electrode formed in a through hole penetrating through the semiconductor substrate in a thickness direction of the semiconductor substrate, and a pad portion formed on the semiconductor substrate and connected to the through electrode. The through hole penetrates through a first conductivity type region of the semiconductor substrate.
申请公布号 US2010207228(A1) 申请公布日期 2010.08.19
申请号 US20100772676 申请日期 2010.05.03
申请人 PANASONIC CORPORATION 发明人 KURIYAMA TOSHIHIRO
分类号 H01L31/14;H01L31/02;H01L31/0224 主分类号 H01L31/14
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