发明名称 Mask adhesion unit and deposition apparatus using the same
摘要 A mask adhesion unit for a deposition apparatus includes a magnetic assembly, a cap plate spaced apart from the magnetic assembly, and a magnetic control unit between edges of the magnetic assembly, and the cap plate. A deposition apparatus using the same is capable of adhering a substrate and a mask assembly together using the mask adhesion unit to improve deposition precision, while preventing deformation of a slit of the mask assembly.
申请公布号 US2010206222(A1) 申请公布日期 2010.08.19
申请号 US20100656406 申请日期 2010.01.28
申请人 SUNG DONG-YOUNG;KIM JAE-JUNG 发明人 SUNG DONG-YOUNG;KIM JAE-JUNG
分类号 B05C21/00 主分类号 B05C21/00
代理机构 代理人
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