| 摘要 |
PROBLEM TO BE SOLVED: To heighten the reliability of handling microobjects of 1μm or below, which has been difficult, by etching a micromanipulator part, which is incorporated in an FIB system, at the site and to improve operation efficiency and maintainability by reusing a manipulator. SOLUTION: A manipulator tip part is treated with a Focused Ion Beam (FIB) prior to a manipulation operation by holding the micromanipulator part by a moving mechanism for changing position and orientation. Even in the presence of contamination and damage in a manipulator tip during the operation, the manipulator tip is regenerated into a reusable shape by the treatment. COPYRIGHT: (C)2010,JPO&INPIT |
