摘要 |
<P>PROBLEM TO BE SOLVED: To easily peel and remove a film adhering to a surface of a film formation roller in itself. <P>SOLUTION: A long substrate sheet 8 constituting a collector for a lithium ion battery is transported while contacting with the film formation roller 4 to form a film on a surface of the substrate sheet 8. A surface temperature of a part with which the substrate sheet 8 does not contact in the film formation roller 4 is made to be lower than that of a part with which the substrate sheet 8 contacts in the film formation roller 4. In addition, the film adhering to the part in which the surface temperature of the film formation roller 4 is lowered is peeled off by a collision of neutral particles. <P>COPYRIGHT: (C)2010,JPO&INPIT |