| 摘要 |
PROBLEM TO BE SOLVED: To provide a scanning electron microscope for acquiring contrast enhancement and change-with-lapse-of-time information of sample information, out of the same detection acquisition information, while reducing a noise, in re-edition of an image, in the scanning electron microscope using a plurality of detectors, and an image storage system and an image re-editing method therefor. SOLUTION: This scanning electron microscope includes an electron source, and the detectors for detecting an electron obtained by irradiation, by converging a primary electron beam emitted from the electron source to irradiate a sample, and forms a sample image based on an output from the detectors. Signal information detected by each detector is obtained in each irradiation position of the electron beam, to be stored while the signal information is correlated with scanning position information and scanning frequency information, and the stored signal information is computed to prepare the sample image, in the scanning electron microscope. COPYRIGHT: (C)2010,JPO&INPIT |
