| 摘要 |
PROBLEM TO BE SOLVED: To provide a capacitor structure that prevents a capacitor from breaking due to deformation of a penetrating electrode, and to provide the method for manufacturing the capacitor structure. SOLUTION: The capacitor structure 100 has: a substrate 1; a penetrating electrode 2 penetrating the inside of the substrate 1; a cavity 3 provided on the upper side of the penetrating electrode 2; and a capacitor 4 which is provided on the upper side of the substrate 1 and further on the outside of the cavity 3. Consequently, the transmission of damage to a dielectric body 4b of the capacitor 4 due to thermal expansion of the penetrating electrode 2 can be prevented. Consequently, the capacitor 4 can be formed after preliminarily preparing the substrate in which the penetrating electrode 2 is formed. Consequently, the degree of freedom in a forming method of the penetrating electrode 2 goes up, and it becomes possible to use the substrate having the thickness in which handling is easy. COPYRIGHT: (C)2010,JPO&INPIT |
