| 摘要 |
<P>PROBLEM TO BE SOLVED: To inspect a formation state of a saw mark on the whole surface of a solar battery wafer quantitatively at high speed with a detailed space resolution, by extracting only an image of the saw mark precisely from an image of the whole surface of the solar battery wafer. Ž<P>SOLUTION: Edge emphasis processing in a direction orthogonal to a longitudinal direction of the image of the saw mark is applied to input image data acquired by imaging the surface of the solar battery wafer, to thereby generate edge-emphasized image data (S2), and high-pass filtering in a direction parallel to the longitudinal direction of the image of the saw mark is applied to the edge-emphasized image data, to thereby generate high-pass image data (S3), and high-pass emphasized image data are subtracted from the edge-emphasized image data, to thereby generate image data for inspection from which the image of the saw mark is extracted (S4), and an evaluation value of the formation state of the saw mark is calculated based on the image data for inspection (S5). Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
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