发明名称 HIGH-PRESSURE CLEANING LIQUID INJECTION TYPE CLEANING APPARATUS
摘要 PROBLEM TO BE SOLVED: To provide a high-pressure cleaning liquid injection type cleaning apparatus in which structure can be simplified, reduction of size and weight can be attained, cost reduction can be attained and vibration of the apparatus is suppressed when cleaning to enable the apparatus to perform uniform and efficient cleaning. SOLUTION: The high-pressure cleaning liquid injection type cleaning apparatus 1 is equipped with a large number of ejection nozzles 3 which eject high-pressure cleaning liquid to an object to be cleaned x in a rectilinear shape and carry out cleaning. A large number of ejection nozzles 3 are arranged along a longitudinal direction of a lower surface of a nozzle holder 2 at a definite space, and both sides of the nozzle holder 2 are supported by a pendulum member 15 to a top end part of a support member 14 of a support pillar 13 so as to be swingable in the longitudinal direction of the nozzle holder 2. The nozzle holder 2 is made to perform pendulum motion in the longitudinal direction while conveying the object to be cleaned x in the direction which intersects perpendicularly in the longitudinal direction of the nozzle holder 2 and at the same time the high-pressure cleaning liquid is ejected to the object to be cleaned x from each ejection nozzle 3 to carry out cleaning. COPYRIGHT: (C)2010,JPO&INPIT
申请公布号 JP2010179235(A) 申请公布日期 2010.08.19
申请号 JP20090024541 申请日期 2009.02.05
申请人 KAWASAKI PLANT SYSTEMS LTD 发明人 NOMURA MITSURU;KUGE MORIMASA;TSUJITA CHIKAFUMI;TANAKA HIDEYUKI
分类号 B08B3/02;B05B1/20;G02F1/13;H01L21/304 主分类号 B08B3/02
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