发明名称 |
METHOD OF FABRICATING A FLEXIBLE DISPLAY DEVICE |
摘要 |
A method of fabricating a flexible display device. The method includes forming an adhesive layer on a first carrier substrate; laminating a first flexible substrate on the adhesive layer, so that a first separation layer of the first flexible substrate is disposed on the adhesive layer; forming a thin film transistor array on the first flexible substrate; and separating the first carrier substrate from the flexible substrate by directing a laser beam onto the first separation layer. The first separation layer comprises silicon nitride (SiNx) with amounts of nitride A1 and amounts of silicon B1 satisfying 0.18≦̸{A1/B1}≦̸0.90.
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申请公布号 |
US2010210055(A1) |
申请公布日期 |
2010.08.19 |
申请号 |
US20100772906 |
申请日期 |
2010.05.03 |
申请人 |
YOON MIN-HO;ROH NAM-SEOK;KIM MYUNG-HWAN;KIM SAN-IL;LEE WOO-JAE;KIM JONG-SEONG |
发明人 |
YOON MIN-HO;ROH NAM-SEOK;KIM MYUNG-HWAN;KIM SAN-IL;LEE WOO-JAE;KIM JONG-SEONG |
分类号 |
H01L33/58;H01L21/336 |
主分类号 |
H01L33/58 |
代理机构 |
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