发明名称 SEMICONDUCTOR DEVICE AND PRODUCING METHOD THEREOF
摘要 A semiconductor device having a small parasitic resistance and a high driving current is provided. The semiconductor device includes a fin portion that includes a pair of source/drain regions located on both end sides and a channel region sandwiched between the pair of source/drain regions; films that are formed on both sides in a channel-width direction of the fin portion; a gate electrode that is provided so as to stride across the channel region of the fin portion; a gate insulating film that is interposed between the gate electrode and the channel region; and a stress applying layer that applies a stress to the channel region of the fin portion, an upper surface and side surfaces of the source/drain region being coated with the stress applying layer in the fin portion, a lower end surface of the stress applying layer being in contact with the film with no gap.
申请公布号 US2010207209(A1) 申请公布日期 2010.08.19
申请号 US20090563298 申请日期 2009.09.21
申请人 INOKUMA HIDEKI 发明人 INOKUMA HIDEKI
分类号 H01L29/786;H01L21/336 主分类号 H01L29/786
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