NANO-LOGIC CIRCUITS AND THE METHOD OF MANUFACTURING THE SAME

摘要

PURPOSE: By embodying the depletion mode nanowire transistor and the logic circuit consisting of the propagating nanowire transistor the nano device logic circuit and manufacturing method thereof can improve gain and noise margin of the logic circuit. CONSTITUTION: The element substrate comprises the first element area and the second element area. The depletion mode nanowire transistor(200) is arranged on the first element area. The propagative nanowire transistor(300) is arranged on the second element area. The wire portion(400) electrically interlinks the depletion mode nanowire transistor and propagative nanowire transistor.