PURPOSE: An optical apparatus for plasma is provided to measure the spatial distribution of plasma emitted light by regulating the distance between a light receiving lens and a pin-hole. CONSTITUTION: A light receiving lens(110) receives optical emission spectrum from plasma. A first aperture is arranged between the light receiving lens and the plasma to block out-focused light. A second aperture is arranged between the light receiving lens and the phase forming region of the light receiving lens to block in-focused light. A pin-hole is arranged in the phase forming region of the light receiving lens to limit the depth of focus with respect to a target region.
申请公布号
KR20100091378(A)
申请公布日期
2010.08.19
申请号
KR20090010547
申请日期
2009.02.10
申请人
SAMSUNG ELECTRONICS CO., LTD.;INDUSTRY-ACADEMIC COOPERATION FOUNDATION, YONSEI UNIVERSITY
发明人
YI, HUN JUNG;CHAE, SEUNG KI;HAHN, JAE WON;OH, CHANG HOON