| 摘要 |
PURPOSE: A particle contamination testing device on a material for a clean room is provided to measure on a material for a clean room by spraying clean gas into a rotating drum. CONSTITUTION: A particle contamination testing device(100) on a material for a clean room comprises a chamber(110), a rotating drum(120) and a clean gas spray port(118). On the chamber, a clean gas intake(111) and a gas oulet(112) are formed. On one side of the chamber, an openable door(113) is formed. On the rotary drum, a plurality of penetration holes(121) are formed. The rotating drum is located in the chamber and is able to rotate with a motor(122). The clean gas spray port is located through the chamber. The clean gas spray port sprays the high-pressure clean gas into the rotating drum. A gas discharge pipe extended from the gas outlet is connected to an openable valve(116).
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