DEVICE AND METHOD FOR HEATING

摘要

PROBLEM TO BE SOLVED: To provide a heating device and method capable of shortening a time necessary for heating a heated object in a vacuum container. SOLUTION: This heating device has the vacuum container 30, and a first gas passage 21a. The vacuum container 30 receives the heated object 11. The first gas passage 21a has a jetting section 22 for directly applying the heated gas to the heated object 11. COPYRIGHT: (C)2010,JPO&INPIT