| 发明名称 |
Verfahren zum Betreiben eines chemisch-mechanischen Polier Systems mittels eines Sensorsignals eines Polierkissenkonditionierers |
| 摘要 |
In a system and a method according to the present invention, a sensor signal, such as a motor current signal, from a drive assembly of a pad conditioning system is used to estimate the status of one or more consumables in a CMP system. |
| 申请公布号 |
DE10324429(B4) |
申请公布日期 |
2010.08.19 |
| 申请号 |
DE2003124429 |
申请日期 |
2003.05.28 |
| 申请人 |
ADVANCED MICRO DEVICES INC. |
发明人 |
KRAMER, JENS;STOECKGEN, UWE GUNTER;KUNATH, JENS |
| 分类号 |
B24B37/04;B24B37/00;B24B49/10;B24B53/00;B24B53/007;B24B53/017 |
主分类号 |
B24B37/04 |
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