发明名称 APPARATUS AND METHOD OF HEAT TREATMENT
摘要 <P>PROBLEM TO BE SOLVED: To provide a technology capable of cooling an object after heat treatment in a short time without damaging the object when heat-treating the object in an atmosphere gas environment. Ž<P>SOLUTION: This invention is actualized as the heat treatment apparatus for heat-treating the object in the atmosphere gas environment. The heat treatment apparatus includes a conveyance container for housing the object and an atmosphere gas, a heating device for heating the conveyance container, and a cooling device for cooling the conveyance container. In the heat treatment apparatus, when conveying the conveyance container from the heating device to the cooling device, the object housed in the conveyance container is not brought into contact with a jig for conveyance. Thus, a situation that the object at a high temperature immediately after the heat treatment is executed is brought into contact with the jig for conveyance at a normal temperature and the object is damaged by a heat shock is prevented. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
申请公布号 JP2010182766(A) 申请公布日期 2010.08.19
申请号 JP20090023237 申请日期 2009.02.04
申请人 TOYOTA MOTOR CORP 发明人 KOMURA YUTA
分类号 H01L21/324;H01L21/02;H01L21/22;H01L21/31;H01L21/677 主分类号 H01L21/324
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