| 摘要 |
<P>PROBLEM TO BE SOLVED: To improve reliability of a sensor apparatus. Ž<P>SOLUTION: The sensor apparatus includes a drive circuit 11A for output of a drive signal; a detection element 12A being input the drive signal from the drive circuit 11A; a detection circuit 13A for taking a response signal from the detection element 12A and for output of it; a processing circuit 14A for taking a sense signal from the response signal and for output of the sense signal from a first output terminal 15A; and a failure diagnosis circuit 16 which covers at least one of the drive circuit 11A, the detection element 12A, the detection circuit 13A, and the processing circuit 14A as a failure diagnosed part, determines whether the failure diagnosed part is normal or abnormal, and outputs a failure detection signal from a second output terminal 16A when determining abnormality. When the failure diagnosis circuit 16 determines that the failure diagnosed part is abnormal, a signal in a level of non-sensitive for controlled objects is output from the first output terminal 15A. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
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