| 摘要 |
The present invention relates to a production process for an optical waveguide comprising a step for forming a photosensitive resin layer comprising a photosensitive resin composition on a substrate, a step for exposing a desired pattern and a step for carrying out development in an alkaline developer containing a divalent or higher-valent metal ion and a production process for an optical waveguide comprising a step for forming a photosensitive resin layer comprising a photosensitive resin composition on a substrate, a step for exposing a desired pattern, a step for carrying out development in an alkaline developer and a step for carrying out washing with a cleaning liquid containing a divalent or higher-valent metal ion or an acid aqueous solution. Capable of being provided are a production process for an optical waveguide which is excellent in a transparency and a reliability and an optical waveguide produced by the above production process.
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