| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an immersion lithographic apparatus which reduces cooling when extracting an immersion liquid. <P>SOLUTION: A capillary channel 20 is formed between a substrate holder WH and an edge structure 15. A plurality of electrodes 21, 22, 23 and 24 are arranged along the capillary channel 20, and the electrodes become lyophilic when it is charged. By using the electrodes, drops of liquid are separated, or the liquid can be pumped along the capillary channel. <P>COPYRIGHT: (C)2010,JPO&INPIT |
