摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a transparent electrode in which conductivity of transparent conductive oxide with zinc oxide as a main composition is improved and moreover which is excellent in moisture-heat resistance. <P>SOLUTION: The transparent conductive oxide with zinc oxide as a main composition contains zinc selenide 0.2-6.0 atom% as a conductive doping agent. Further, silicon 0.5-5.0 atom% is preferably contained to enhance moisture-heat resistance. These transparent conductive oxides 2 are used to form a transparent electrode layer to manufacture a substrate 1 with a transparent electrode excellent in conductivity, transparency, and moisture-heat resistance. <P>COPYRIGHT: (C)2010,JPO&INPIT</p> |