发明名称 SYSTEM IDENTIFICATION METHOD
摘要 <p><P>PROBLEM TO BE SOLVED: To provide a system identification method that can determine a model of a control system so as to match an actual control system in both frequency response and time response simultaneously. <P>SOLUTION: The system identification method for determining a model representing control characteristics of a control system includes the steps of: measuring a frequency response of the control system (S101); measuring a time response of the control system (S101); determining a frequency response according to the model of the control system (S102); determining a time response according to the model of the control system (S102); determining a first evaluation value from the measured frequency response and the frequency response based on the model (S103); determining a second evaluation value from the measured time response and the time response based on the model (S103); determining a third evaluation value by weighting the first evaluation value and second evaluation value (S103); and optimizing the model according to the third evaluation value (S104-S106). <P>COPYRIGHT: (C)2010,JPO&INPIT</p>
申请公布号 JP2010182186(A) 申请公布日期 2010.08.19
申请号 JP20090026426 申请日期 2009.02.06
申请人 NIKON CORP 发明人 SAEKI KAZUAKI;HIRACHI KAZUYUKI;HAKODA FUMIHIKO;HONDA SHINYA
分类号 G05B23/02 主分类号 G05B23/02
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