| 摘要 |
<P>PROBLEM TO BE SOLVED: To reduce an anodic resistance in a light-receiving element, and to suppress generation of a leak current in between separated, mutually adjoining photodiodes. <P>SOLUTION: A light-receiving element has a first conductive semiconductor substrate (52) or a first conductivity-type semiconductor layer, and a first conductivity-type isolation region (55) formed in the first conductivity-type semiconductor substrate (52) or the type semiconductor layer. Further, the element has a plurality of second conductivity-type semiconductor layers (53A, 53B) formed in the first conductivity-type semiconductor substrate (52) or the semiconductor layer and separated at the isolation region (55), and an antireflection film (57) formed on a light-receiving region (61), including the isolation region and a plurality of second conductivity-type semiconductor layers. Moreover, the element has a first electrode (64) formed of silicide, electrically connected to the first conductivity-type semiconductor substrate or the semiconductor layer, covered by an upper film (59), constituting the antireflection film (57), and formed along the surface of the isolation region (55). <P>COPYRIGHT: (C)2010,JPO&INPIT |
