VAPORIZER, VAPORIZER FOR MOCVD USING THE VAPORIZER, CENTER ROD USED FOR THESE VAPORIZERS OR THE VAPORIZER FOR MOCVD, METHOD FOR DISPERSING CARRIER GAS, AND METHOD FOR VAPORIZING CARRIER GAS

摘要

PROBLEM TO BE SOLVED: To provide a vaporizer which can efficiently cool a carrier gas, enhance an effect of preventing the occurrence of clogging of a material in the vicinity of an outlet of a gas passage 5, contribute to the prolongation of a maintenance period and the enhancement of an availability ratio, and show a more uniform dispersion effect.

SOLUTION: The vaporizer includes: a center rod 35 which is inserted into a carrier gas introduction hole formed in a distributor 2 and forms the gas passage 5 by collaborating with the inner wall of the hole; a cooling part which is arranged in the outer circumferential side of the carrier gas introduction hole of the distributor 2 and cools the inside of the gas passage 5; a cooling member insertion hole which is formed approximately over the full length of the center rod along the axis line direction of the center rod; and a cooling member which is arranged in the cooling member insertion hole and cools the center rod.

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