发明名称 CHARGED PARTICLE BEAM DEVICE
摘要 PROBLEM TO BE SOLVED: To impart an added value to an obtained image, by eliciting performance and function to the utmost, in each of a detecting method using light under low vacuum as a detection signal source, and a detecting method of a conventional technique using an ion as a detection signal source, and by contriving the optimum constitution of a detecting part, and to provide an observed image thereof to users over wide fields. SOLUTION: Detector constitution is optimized and unity with the conventional method is achieved by utilizing, to the utmost, a property of a light having image information under the low vacuum. The detector is constituted to have both a feature of an image using the light by gas scintillation and a feature of an image by the ion current detecting method of the conventional technique, by the constitution, to allow an observation at the same time. The image is provided to the users over the wide fields, freely from a vacuum mode, by the optimum constitution usable in combination with a high-vacuum detector. COPYRIGHT: (C)2010,JPO&INPIT
申请公布号 JP2010182550(A) 申请公布日期 2010.08.19
申请号 JP20090025495 申请日期 2009.02.06
申请人 HITACHI HIGH-TECHNOLOGIES CORP 发明人 KATANE JUNICHI;ITO MASUHIRO
分类号 H01J37/244;H01J37/28 主分类号 H01J37/244
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