| 摘要 |
PROBLEM TO BE SOLVED: To provide a method for evaluating quality of a housing case of semiconductor wafer capable of easily evaluating the quality of the housing case of the semiconductor wafer in a short time, and evaluating the quality of the housing case by estimating a storage life of the semiconductor wafer housed therein in room temperature. SOLUTION: After drying the wafer housing case in a prescribed condition, the semiconductor wafer is housed therein and heated for a prescribed time at a prescribed temperature higher than room temperature, and the quality of the semiconductor wafer being housed in the heated wafer housing case is determined, and then an Arrhenius plot operation is carried out on the basis of the quality of the semiconductor wafer determined to be at the prescribed temperature, and an amount of moisture adsorbed by the housing case is calculated on the basis of a room temperature moisture amount in the housing case, and the room temperature storage life of the semiconductor wafer is estimated on the basis of a result of the Arrhenius plot operation and the amount of moisture adsorbed by the wafer housing case. COPYRIGHT: (C)2010,JPO&INPIT |
