发明名称 CONTROL DEVICE
摘要 PROBLEM TO BE SOLVED: To improve synchronization accuracy while simplifying derivation or adjustment of a control system in synchronous control based on a bilateral (multi-lateral) system. SOLUTION: A control device includes an iterative learning control circuit that includes first and second learning filters to receive a synchronization error and is configured to feed forward a control input to a first control target based on an output of the first learning filter and to feed forward a control input to a second control target based on an output of the second learning filter. The first learning filter includes transfer functions of the first and second control targets and transfer functions of controllers of the first and second control circuits, and the second learning filter includes transfer functions of the first and second control targets and transfer functions of the controllers of the first and second control circuits. COPYRIGHT: (C)2010,JPO&INPIT
申请公布号 JP2010181955(A) 申请公布日期 2010.08.19
申请号 JP20090022723 申请日期 2009.02.03
申请人 CANON INC 发明人 TAKAGI KIYOSHI
分类号 G05D3/00;G05B11/32;G05B13/02;G05B19/18;G05D3/12;H01L21/68 主分类号 G05D3/00
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